FMOkit is a command-line toolkit written in Python for both preprocessing and postprocessing of Fragment Molecular Orbital(FMO) calculations. Generates GAMESS input files for FMO calculations from the ...

Abstract: Cluster tools are extensively used for processing wafers in semiconductor manufacturing. To enhance the throughput of cluster tools, concurrent processing of multiple types of wafers has ...

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Abstract: Lightpipe radiation thermometers (LPRTs) are widely used to measure wafer temperatures in rapid thermal processing (RTP) tools. Using blackbody-calibrated LPRTs to infer the wafer ...